Fabrication of highly c-axis oriented ZnO thin films for UV photodetector applications by PECVD
碩士 === 國立臺北科技大學 === 製造科技研究所 === 102 === In the study, metallic zinc thin films were deposited onto c-cut sapphire substrates by plasma enhanced chemical vapor deposition system (PECVD) with Diethylzinc (DEZn) as precursors, after atmosphere annealing at 450 ℃and 550 ℃, metallic zinc thin films will...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/uzvd5q |