| Summary: | 碩士 === 大同大學 === 材料工程學系(所) === 102 === Silicone films have many particular properties for optical devices. Plasma polymerization of silicone monomer is capable of creating uniform, functional and well adhesive organic silicon thin film, which provides lower refractive index and excellent adhesion for interlayer with higher energy employed in plasma process, the structure of organic silicone film can be changed from organic to inorganic. In this study, the characteristic of plasma polymerized layers of vinyltrimethylsilane (VTMS), hexamethyldisilazane (HMDSZ) and oxygen, including hydrophobic, aging, morphology, growth rate, adhesion and optical property is studied. The substrates deposited by VTMS or HMDSZ under variety of conditions, were found hydrophobic with water contact angle increased from 37 to 91±4 degree, respectively. The transmittance at 550 nm wavelength of PD-HMDSZ films and PD-VTMS films in UV-visible spectra modified PET was changed not obviously and varied from 89 to 95 %, respectively. The refractive index of PD-HMDSZ films and PD-VTMS films was measured from 1.48-1.51 and 1.48-1.53, respectively, then decreased after oxygen-post treatment. Also the PD-VTMS films have better adhesion after oxygen-post treatment. And the results showed the silica films can improve the water vapor transmission rate.
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