| Summary: | 碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === DLC (Diamond Like Carbon) film is a kind of film that possesses high hardness, low friction, extremely good chemical stability, insulating and heat-conduction excellent, wear-resisting characteristic of dawdling. Revealing the important application on industry. In this study, we used ion-evaporation to deposit DLC film,the plasma source came from three –electrode structure including the filament and the anode and the high-temperature metal (refractory) a direct current arc discharge ion sources. This method is also called Ion plating.With characteristics of ion-evaporator and DC-plasma CVD.
Benzene (C6H6) gas mixed with HMDSO was used in this study.To explore the content of Si atom% under different gas proportions how to influence DLC film.Raman spectrum was used to analyze the content of SP2；SP3 and their variation,and to derive a suitable gas proportion and heat-conduction for DLC film with better qualities.
Finally ,we use best DLC films in precision glass molding process.we deposited this kind of DLC film on superhard tungsten carbides.In precision glass molding process for more massive production.
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