Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology
碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === DLC (Diamond Like Carbon) film is a kind of film that possesses high hardness, low friction, extremely good chemical stability, insulating and heat-conduction excellent, wear-resisting characteristic of dawdling. Revealing the important application on industr...
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ndltd-TW-103NCHU51590552016-02-25T04:11:56Z http://ndltd.ncl.edu.tw/handle/27106982600636706680 Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology 類鑽碳薄膜應用於精密玻璃模造之研究 Min-Jian Lin 林明建 碩士 國立中興大學 材料科學與工程學系所 103 DLC (Diamond Like Carbon) film is a kind of film that possesses high hardness, low friction, extremely good chemical stability, insulating and heat-conduction excellent, wear-resisting characteristic of dawdling. Revealing the important application on industry. In this study, we used ion-evaporation to deposit DLC film,the plasma source came from three –electrode structure including the filament and the anode and the high-temperature metal (refractory) a direct current arc discharge ion sources. This method is also called Ion plating.With characteristics of ion-evaporator and DC-plasma CVD. Benzene (C6H6) gas mixed with HMDSO was used in this study.To explore the content of Si atom% under different gas proportions how to influence DLC film.Raman spectrum was used to analyze the content of SP2;SP3 and their variation,and to derive a suitable gas proportion and heat-conduction for DLC film with better qualities. Finally ,we use best DLC films in precision glass molding process.we deposited this kind of DLC film on superhard tungsten carbides.In precision glass molding process for more massive production. Shinow-Kang Yen 顏秀崗 2015 學位論文 ; thesis 56 zh-TW |
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碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === DLC (Diamond Like Carbon) film is a kind of film that possesses high hardness, low friction, extremely good chemical stability, insulating and heat-conduction excellent, wear-resisting characteristic of dawdling. Revealing the important application on industry. In this study, we used ion-evaporation to deposit DLC film,the plasma source came from three –electrode structure including the filament and the anode and the high-temperature metal (refractory) a direct current arc discharge ion sources. This method is also called Ion plating.With characteristics of ion-evaporator and DC-plasma CVD.
Benzene (C6H6) gas mixed with HMDSO was used in this study.To explore the content of Si atom% under different gas proportions how to influence DLC film.Raman spectrum was used to analyze the content of SP2;SP3 and their variation,and to derive a suitable gas proportion and heat-conduction for DLC film with better qualities.
Finally ,we use best DLC films in precision glass molding process.we deposited this kind of DLC film on superhard tungsten carbides.In precision glass molding process for more massive production.
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author2 |
Shinow-Kang Yen |
author_facet |
Shinow-Kang Yen Min-Jian Lin 林明建 |
author |
Min-Jian Lin 林明建 |
spellingShingle |
Min-Jian Lin 林明建 Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology |
author_sort |
Min-Jian Lin |
title |
Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology |
title_short |
Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology |
title_full |
Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology |
title_fullStr |
Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology |
title_full_unstemmed |
Diamond-Like Carbon Thin Films Applied in Precision Glass Molding Technology |
title_sort |
diamond-like carbon thin films applied in precision glass molding technology |
publishDate |
2015 |
url |
http://ndltd.ncl.edu.tw/handle/27106982600636706680 |
work_keys_str_mv |
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