A study of key manufacturing parameters for the quality of sol-gel PZT thin films
碩士 === 國立中興大學 === 機械工程學系所 === 103 === In this thesis, parameters of sol-gel process were studied to improve the quality of PZT thin film. The quality of PZT thin film was characterized by optical microscope, PE loop and LCR meter. Temperature of third pyrolysis step and temperature of sintering...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23608544309798466403 |