Energy Saving for the Vacuum Pump with Vacuum Generator

• Main Authors: Yen-Hsiang Wang, 王彥翔
• Other Authors: 盧昭暉
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/2pkp63

碩士 === 國立中興大學 === 機械工程學系所 === 103 === Abstract Cost reduction and increasing added value are the main targets of the competitive panel industry for sustainable growth.Energy consumption accounts for a large part of production costs and therefore energy saving will be an important issue for the panel industry. In this paper we present an energy-saving vacuum pump for chemical vapor deposition which lowers the operation loading by using the features of the vacuum generator. This paper describes how the vacuum generator operates with laval nozzle and indicates the usage of vacuum pump. The compressed air is driven by vacuum generator from the supply port into the ejector, and the laval nozzle increases the flow velocity of the air to supersonic speed.After exiting the laval nozzle, the air expands and results in decreased pressure to create a vacuum in the chamber, which causes air to be drawn in from the vacuum port. In the performance tests, different kinds of vacuum generators are tested in various purge nitrogen parameters to analyze the change between the vacuum degree created by the vacuum generator and the power consumption of vacuum pump.The influence of purge nitrogen of vacuum pump upon vacuum degree is also reviewed to find the possible energy-efficient models. After comparing with the costs of compressed air used by the vacuum generator, the best energy-saving vacuum pump with vacuum generator is obtained.