Fabrication and Characterization of Three Dimensional Magnetic field Sensors using Spin-Valve Devices
碩士 === 國立彰化師範大學 === 光電科技研究所 === 103 === The objective of this thesis is aiming to fabricate and analyze a planarized three-dimensional magnetic field sensor. A spin valve structure consisting of Ta (2nm)/ IrMn (10nm)/ CoFe (2.5nm)/ Cu(2.2nm)/ CoFe(1.5nm)/ NiFe (3nm)/ Ta (5nm)/ SiO2/Si is used as sen...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/59850302377280405385 |