| Summary: | 碩士 === 國立嘉義大學 === 電子物理學系光電暨固態電子研究所 === 103 === Fabrication of thermoacoustic device based on conductive film of ITO glass is studied. The device is fabricated by patterning the interdigitated-like electrodes composed of ITO film with adjoining different thickness. The SPL has a stable wide-band frequency response and averages of ~ 56.9 dB at resistance of the device made of ~ 400Ω. The SPL is increased, reached to its maximum at resistance of ~ 400Ω, and then decreased with increasing resistance of the device. As the resistance of the device is ~ 400Ω, the electrons conducting on the etched stripe are easily accumulated to make the temperature of the device increased largely, and that result the SPL to be large. The sound mainly generated from etched layer at resistance of ~ 400Ω is verified by C-AFM. By depositing gold film of ~ 4nm on the device , the SPL increases about 7 dB and the temperature reduces about 20 ℃. The reason is the electrons conduct easily and the heat conducts uniformly as the rough surface of conducting film is smoothed by gold film.
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