Growth of Zinc Oxide Nano-structure on（100）γ-LiAlO2 Substrate by Chemical Vapor Deposition

• Main Authors: You-cheng Zhang, 張友誠
• Other Authors: Mitch, Ming-Chi Chou
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/6brb23

碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 103 === In this thesis, we use (100) γ-LiAlO2 (LAO) substrates to grow non polar m-plane zinc oxide nano-combs by chemical vapor deposition (CVD) process. The zinc oxide and graphite powder mixture was adopted as reaction source, argon and oxygen were used as transport gas and reaction gas. A thin layer of Ni was deposite on the substrate as catalyst for vapor-liquid-solid (VLS) growth mechanism. In this study, we investigate the influence for deposite time of Ni layer reaction temperature and reaction time to the growth of zinc oxide nano-combs. The orientation and surface morphology of the specimen was investigate by X-ray diffractometer (XRD) and scanning electron microscopy (SEM). By using Transmission Electron Microscope (TEM), Photoluminescence Spectroscope (PL), and Raman Spectroscope (Raman), we can obtain the crystallization characteristics, optical properties and inner stress of the specimen, so the growth mechanism of the zinc oxide nano-combs can be investigated.