Structures and dielectrics of sputtered epitaxial TiO2/HfO2 superlattices
碩士 === 國立中山大學 === 物理學系研究所 === 103 === RF magnetron sputtering has been used to deposit thin films of TiO2/HfO2 superlattices in alternating sequence on c-oriented sapphire substrates using titanium, or titanium dioxide, and Hafnium dioxide targets. The thin films thus obtained have higher dielectric...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66084903570190694582 |