Study and Development of Three-Dimensional Topography Measurement System with Phase Shifting Differential Interference Contrast Technique
博士 === 國立清華大學 === 動力機械工程學系 === 103 === Various transparent components are recently used in numerous optoelectronic devices. As to ensure the product quality, there is an increasing demand for precision profile measurement of these transparent objects. For biological application, quantitative real-ti...
Main Authors: | Yu, Sheng-Kang, 余昇剛 |
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Other Authors: | Lin, Shih-Chieh |
Format: | Others |
Language: | en_US |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/58128920412749196142 |
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