Growth of ZnO Nanorods by Metal-Organic Chemical Vapor Reaction

• Main Authors: Yao-Chung Hsu, 許耀中
• Other Authors: 王耀德
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/vqdjb3

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 103 === In this research, highly oriented single crystal ZnO nanorods were successfully grown on Si substrate by using metal-organic chemical vapor reaction under 540°C and atmosphere pressure through vapor-solid mechanism with zinc acetylacetonate (Zn (C5H7O2)2) powder as precursor. We found that the growth time affects the length and the diameter of ZnO nanorods by observing the surface structure through SEM. The analysis of XRD showed that the ZnO nanorods were highly c-axis oriented. At room temperature, the as-grown ZnO nanorods present strong exciton emission centered at 377nm and null visible emission under UV photon excitation. In our study, that the c-axis is the preferred orientation is also confirmed by replacing Si substrate by glass.