Research on promotion of glass transmittance by ion beam bombardment

• Main Authors: Tian-Sing Lan, 藍天行
• Other Authors: Sing-Dar Wang
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/47561509223562272340

碩士 === 國立雲林科技大學 === 材料科技研究所 === 103 === Argon and oxygen were bombarded with electron beam under 0.1 torr enviro nment. Argon ion and oxygen ion were accelerated by electric field and then bombarded glass with high speed. The flow rates of Ar and O2, and the magnitude of accelerating electric field were varied to investigate their effects on the morphologies of holes. Transmittance of the glass was measured by UV-VIS spectrophotomter, the morphology of the bombarded glass was investigated by optical microscope and scanning electron microscope. Under the best conditions of +200 V at the bottom copper electrode, with gas mixture of 1 torr Ar:1 torr O2, the electron gun with a transverse rate of 10 mm/sec and vertical displacement of 2 mm, and a distance of 4.7 cm between the electron gun and the glass substrate, the average transmittance of visible light of the bombarded glass was 91.20% which was a little smaller than 91.50% of an untreated glass. The observations of optical microscope and scanning electron microscope showed that there were not only holes with diameter smaller than 100 nm but also many holes with diameter of several hundred nm or even micrometer within the bombarded glass. Holes with large diameter scattered light seriously. Since glass is a brittle material, the holes in the bombarded glass produced due to the bombardment of ionized particle with high speed have large variabilities. Therefore, the transmittance of a glass substrate can not be effectively promoted by the bombardment of ionized particle. Keywords： Glass、Ion、Electron beam、Anti-reflection