Flexible and Transparent Conducting ZZO/Ag/ZZO Multilayer Grown by Sputtering at Room Temperature
碩士 === 健行科技大學 === 電子工程系碩士班 === 104 === In this study, the optical, electrical, and structural properties of indium-free Zr-doped ZnO (ZZO)/Ag/ZZO multilayers prepared on poly(ether sulfone) (PES) substrates by RF magnetron sputtering at room temperature. The optical and electrical characteristics of...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08300456335545035844 |
| Summary: | 碩士 === 健行科技大學 === 電子工程系碩士班 === 104 === In this study, the optical, electrical, and structural properties of indium-free Zr-doped ZnO (ZZO)/Ag/ZZO multilayers prepared on poly(ether sulfone) (PES) substrates by RF magnetron sputtering at room temperature. The optical and electrical characteristics of the crystalline ZZO/Ag/ZZO multilayer electrodes can be improved by the insertion of a nano-sized Ag interlayer with an optimized thickness between top and bottom ZZO films, owing to the very low resistivity. The ZZO/Ag (12 nm)/ZZO/PES exhibited high transmittance of ~85.6% in the wavelength range from 450 to 600 nm and a low resistivity of ~6 x 10-5 Ωcm . Additionally, X-ray photoelectron spectroscopy (XPS) investigations for the ZZO/Ag/ZZO multilayers confirmed no interfacial reaction between the ZZO and Ag films. The performances indicate that the indium-free ZZO/Ag/ZZO multilayers are promising as transparent conducting films for low-cost flexible optoelectronics applications.
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