| Summary: | 碩士 === 義守大學 === 材料科學與工程學系 === 104 === The microstructural, surface morphological and nanomechanical properties of iron-palladium (FePd) thin films are studied by using X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and nanoindentation techniques. The FePd thin films are deposited on the glass substrates using magnetron sputtering at room temperature. The post-annealing processes were carried out at 400°C and 750°C, respectively, have resulted in both the average grain size and surface roughness of FePd thin films increased significantly, in addition to the improved thin films crystallinity. The XRD results show that FePd thin films are predominant (111) orientation. Moreover, the continuous stiffness measurements (CSM) technique is used in the nanoindentation tests to determine the hardness and Young’s modulus of FePd thin films. In addition, the fracture behaviors of FePd thin films are also discussed in this study.
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