Effect of Hydrogn Plasma on Optical Properties of Each Layer in SnOx/NiCrOx/Ag/AZO/SnOx Films
碩士 === 崑山科技大學 === 電機工程研究所 === 104 === SnOx/NiCrOx/Ag/AZO/SnOx multilayer films applied in low emissivity glass were deposited on glass by in-line sputtering. Part of the deposited films was annealed with hydrogen plasma. Optical properties of the as-deposited and plasma annealed films was compared....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38004885526478291145 |