Modeling and Control of Pressure Dispensing System

• Main Authors: Liao-Bo-Chun, 廖泊淳
• Other Authors: Kuo-Ming Chang
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/j6kyhg

碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 104 === As the technology advances, the volume of electronic products will continue to shrink, whose functions are increasing, and the electronic packaging technology will be increasingly important. Dispensing technology is an important part in electronic packaging technology, in which the space of colloid and substrate wafer is also getting smaller and smaller. In view of this point, we need to make the precise amount of colloid control. Firstly, referring to the literature, we construct the mathematical model of the dispensing system on the basis of hydrodynamics and then we control the flow rate of colloid as the control objective. In this dissertation, we design various controller for controlling the magnitude of input voltage of the servo valve to achieve the control goal. Some simulation results are given by using the sliding mode control, PID control and fuzzy control scheme. From simulation results, it is shown that the sliding mode controller is better than other controllers. Even though the results given by using fuzzy controller and PID controller does not so quickly compared to sliding mode controller, it is shown that the flow rate of the dispensing system can effectively reach the reference goal in a finite time under the limited input.