Processing and Evaluation of TiNxOy Thin Films Prepared by Sputtering Using Air as a Reactive Gas
碩士 === 國立中興大學 === 材料科學與工程學系所 === 104 === This study focuses on the processing and evaluation of TiNxOy thin films by DC unbalanced magnetron reactive sputtering using air as a reactive gas. The films were prepared on silicon, ITO glass, and glass substrates respectively and the films with different...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77331648484291751037 |