Slanted Grating Manufacturing for the Luminescent Solar Concentrator Using the Canted Exposure Method

• Main Authors: Pin-Chu Chen 陳品竹, 陳品竹
• Other Authors: Hsi-Fu Shih 施錫富
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/77614422729628900124

碩士 === 國立中興大學 === 機械工程學系所 === 104 === This research was focused on the optical efficiency improvement of the luminescent solar concentrator (LSC). This research combines the slanted grating with the design of the LSC. By adjusting the structure, period, and depth, the incident light can be diffracted into specific orders. It could have the purposes of increasing the transfer efficiency of fluorescent dyes and reducing the area of solar cell usage. First, the diffraction equation was applied to the calculation of both the critical angle for total reflection and the grating period for diffraction in the waveguide. Then, the granting simulation software, Gsolver, was used to analyze the granting structures with different shapes. By investigating the diffraction efficiencies among different orders for grating parameters, the optimal grating design values could be found. In the experiment, the slanted gratings with periods of 4 µm and 6 µm, which have the duty cycle of 50%, were fabricated by the canted exposure method. The photoresist was used as the grating structures. After the lithographic process, the devices were measured for the light intensities of all diffraction orders. Furthermore, different process parameters were tested for comparing the measured results with those of the optical simulation and verifying the feasibility of the manufacturing. Finally, the slanted grating was glued with the fluorescent dye by UV glue for fabricating a compact LSC. In order to verify the design feasibility, waveguide effects were measured and compared with samples of various parameters.