Start-up strategy of anaerobic treatment for TMAH wastewater in a semiconductor fabrication plant
碩士 === 國立交通大學 === 工學院永續環境科技學程 === 104 === Tetramethyl ammonium hydroxide (TMAH) is often applied as a developer in semiconductor and liquid crystal display (LCD) industrial processes. Because environmental protection consciousness surged upward in recent years, EPA of Taiwan tightened the discharge...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tubnr5 |