To investigate the Developer dilute system-an example of 12 inches semiconductor industry

• Main Authors: Wang,Yu-Cheng, 王裕誠
• Other Authors: Fu,Wu-Shung
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/rdcvtg

碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 104 === The semiconductor manufacturing industry is a large group in Taiwan,it need to use the great amount of developer in the manufacturing process. To respond accordingly the manufacturing process continuously evolve and upgrade. Only provide high quality and abundant chemicals,so as to let manufacturing process in of expose and develop to reach the more precisely control. To produce the high accuracy and manufacturing process yield high product. Making use the dilution method can reduce the fill number of times for slot car. It is more likely to reduce the chemical cost for company. To aiming at low concentration、large usage amount chemical,they have the substantial efficiency. The method used by this research is according the developer dilute system in factory,to go through after several years of manufacturing process,the original system constructed has already been not enough to 12 inches semiconductor manufacturing process need. Via for the system improvement method, including confirm the related tank of slot capacity and accuracy、chemical and pure water feed control into the tank、circulate and transformation pump capability tune、external factor remove and control、Acid-Base titration instrument capability tune and original liquid concentration automatically feedback 6 items,etc. After the hardware facilities modifies、carry on actual test and correction. The result really can attain the manufacturing process in the factory concentration specification of the request:2.38wt%±0.001wt%,and over the 15,000L requirement every day. Before modifying with the system and after the modification through actual operation and test result by maintaining the concentration specification. The 2.38 wt% TMAH yield is increase from 14,600 liters to 21,900 liters every day. The productivity promotes 50%. The running cost reduce to reach the 62 million dollars every year.