Modeling and Analysis of Through-mask Electrochemical Micro-machining with a Moving Tool

• Main Authors: Chien-Hui Chen, 陳千蕙
• Other Authors: 洪勵吾
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/d252h4

碩士 === 國立中央大學 === 機械工程學系 === 104 === 　　The development of through-mask electrochemical micro-machining is restricted in the static processing. The size of the tool needs to be the same as the processing zone. However, the electrode of the tool is required to be a good conductivity metal, which is expensive. Based on the cost, in this study, we try to reduce the size of the tool along with a moving speed. The electric field of through-mask electrochemical micro-machining with a moving tool is simulated by using finite element method. Effects of parameters, such as: applied voltage, mask thickness and moving speed etc…, on the resulted holes are investigated. 　　The simulation show that, as the voltage is increased, the machining depth is deeper, the hole diameter is bigger and the aspect ratio is higher. When the thickness of the mask is thinner, the electric field distribution is un-uniform and the lateral etching is higher. The island phenomenon will occur at the center of the workpiece. This is due to the shadow effect of the mask. When the moving speed is slow, the longer processing time causes more current density accumulated on the surface of the workpiece, such that the material removal rate is higher. As the processing time is increased, the lateral etching rate will become slow and the aspect ratio thus become better.