Analysis of thermal flow and mass transport in MOCVD round jet chamber
碩士 === 國立中央大學 === 機械工程學系 === 104 === Metalorganic chemical vapour deposition (MOCVD), with it advantages as better epitaxial layer and high material purity, is a vital process technique for GaN growth in the LED Epitaxy industry.The finite element analysis (FEM) was employed in the current study for...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13649926460549341073 |