| Summary: | 碩士 === 國立中央大學 === 國際永續發展碩士在職專班 === 104 === For proton conduction in the mid- to high-range temperatures (600 – 750C), metal oxide
perovskites provide certain characteristics ideal for applications in fuel cells, electrochemical
reactors, sensors, and hydrogen purification. The capability of conducting protons in metal
oxide perovskites is commonly recognized as a “hopping” mechanism at the microscopic scale,
where protons jump from one oxygen atom to another by Coulombic force at high
temperatures. In this study, we fabricate BaCeO3 thin films by radio frequency sputtering using
metal oxide targets. The films are uniformly deposited on silicon and quartz substrates and
have a thickness of roughly 100 nm. After deposition, all films are subjected to rapid thermal
annealing at various temperatures and time periods in order to achieve crystalline structures.
Specific studies are then perform on the annealed films using surface profiler to determine
deposition rate, X-ray diffraction and Raman spectroscopy for the microstructures, and energydispersive
X-ray spectroscopy for elemental and chemical compositions. The results of these
tests determine a set of optimal parameters for processing BaCeO3 thin films based on the
conditions of deposition and thermal annealing.
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