Research on Modulation of Magnetic Field of CMOS-MEMS Gas Sensing

• Main Authors: Chen Li-Wei, 陳立偉
• Other Authors: Shen Chin-Hsiung
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/68654728451219079501

碩士 === 國立彰化師範大學 === 機電工程學系所 === 104 === Due to the environment pollution issues and industrial demands, many researches are committed to develop a high-performance gas sensor, which can be used to detect toxic and explosive gases. The CO gas sensor is one of the important research topics utilized to detect CO concentrations in environments. In this research, SnO2 doped with MnO is taken as sensing material and a Magnetic-Catalyst is proposed. A gas sensor with mesh stacked electrodes is fabricated mainly by using 2P4M 0.35 μm CMOS MEMS IC technology of TSMC, which detect the CO concentration through combination of sensing circuit, and research on open magnetic and close magnetic balance time. It can be found that in the same magnetic field, gas sensor with sensing material of the low pH has better sensitivity. Also we measure equilibrium time in the open or closed magnetic field, sensor with the conditions of lower pH and higher magnetic field need longer balance time. On the other hand, sensor at higher pH or lower magnetic field conditions, the required time to reach balance short.