High Quality and Low-loss Ta2O5 Micro-ring Resonator Optimization and Application

碩士 === 國立中山大學 === 光電工程學系研究所 === 104 === Recently, nonlinearity of material has been demonstrated in photonic integrated circuits, including all optical modulation, frequency combs, and four-wave mixing. Typically, materials with high nonlinearity, device with high optical quality and dispersion comp...

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Bibliographic Details
Main Authors: Ting-wei Liao, 廖挺位
Other Authors: Chao-Kuei Lee
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/71547542273947063930
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Summary:碩士 === 國立中山大學 === 光電工程學系研究所 === 104 === Recently, nonlinearity of material has been demonstrated in photonic integrated circuits, including all optical modulation, frequency combs, and four-wave mixing. Typically, materials with high nonlinearity, device with high optical quality and dispersion compensation are important issue. In this thesis, using high optical quality Ta2O5 as waveguide material, high Q micro-ring with U- shaped channel waveguide was developed. The Q as high as 85000 was achieved when the diameter of micro-ring resonator and the gap between the waveguide and ring cavity are 100 m and 1100 nm, respectively. The corresponding unloaded Q is over 100000. Additionally, the chromatic dispersion of Ta2O5 waveguide has been theoretically investigated. To compensate the material dispersion from Ta2O5, various dimension of the waveguide with air or SiO2 cladding were analyzed. The preliminary result shows that waveguide with dimension of TE1000×800nm2 and cladding of air exhibit the anomalous dispersion. Meanwhile, the estimated flat and near-zero dispersion of chromatic dispersion curve is expected to optimize the conversion efficiency as well as conversion bandwidth of FWM-OPO process in the Ta2O5 waveguide.