Fabrication of AlN thin film on LiTaO3 substrate and the application on SAW device
碩士 === 國立中山大學 === 電機工程學系研究所 === 104 === In this study, surface acoustic wave (SAW) devices were fabricated by aluminum nitride (AlN) thin films deposited on lithium tantalite (LiTaO3) substrates. The highly c-axis oriented AlN thin films could be obtained by controlling the sputtering parameters and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84456578927412834654 |