Micro-cone Structure Fabrication by Nano 3D Lithography

• Main Authors: Liao, Wei Chien, 廖偉倩
• Other Authors: Fu, Chien Chung
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/94736410376514536970

碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 104 === Micro-cone structures have been widely utilized in different area, for example, microneedle for drug delivering, tip of atomic force microscopy (AFM), microelectrode for academic research, light guide plate of display, etc. These structures are manufactured by common microfabrication technologies usually with complex processes and have some instruct limits in fabricating various shapes and achieving high quality tips such as etching, standard photo lithography process, LIGA process etc. In contrast, a promising method called Nano 3D lithography (N3L) integrated with TPP and dosage accumulation is versatile and feasible to implement arbitrary structures. This thesis proposes to fabricate widely-used micro-cone structures through N3L system with 780nm, 532nm laser and precise optical elements. In the fabrication system, structure was formed by a focused laser with three-axis stage movement, and the voxel size can be adjusted by laser power and the magnification of objective.