Micro-cone Structure Fabrication by Nano 3D Lithography
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 104 === Micro-cone structures have been widely utilized in different area, for example, microneedle for drug delivering, tip of atomic force microscopy (AFM), microelectrode for academic research, light guide plate of display, etc. These structures are manufactured...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/94736410376514536970 |