Micro-cone Structure Fabrication by Nano 3D Lithography

碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 104 === Micro-cone structures have been widely utilized in different area, for example, microneedle for drug delivering, tip of atomic force microscopy (AFM), microelectrode for academic research, light guide plate of display, etc. These structures are manufactured...

Full description

Bibliographic Details
Main Authors: Liao, Wei Chien, 廖偉倩
Other Authors: Fu, Chien Chung
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/94736410376514536970