Study of fabricating selective gas sensors and photodetectors and humidity sensor by two dimensional nano-structure materials.

• Main Authors: Chiou, Bo-Ren, 邱柏仁
• Other Authors: Hsu,Cheng-Liang
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/52207254415382703527

碩士 === 國立臺南大學 === 電機工程學系碩博士班 === 105 === 學系:Department of Electrical engineering 題目:Study of fabricating selective gas sensors and photodetectors and humidity sensor by two dimensional nano-structure materials. 研 究 生 : Bo-Ren Chiou 指導教授 : Cheng-Liang Hsu The aim of this study is to fabricating the sensors by using two dimensional materials, ReSe2 and MoS2, based on nanosheet scale. In the study, a few layers of ReSe2 samples with different thickness were prepared by the method of mechanical exfoliation for the purposes of the fabrication of single selective gas sensor and highly sensitive photodetector.Which was tested with various wavelength of lights (365,470,530,630nm) at basis of 12mW/cm2. In addition to that, the photodetector prepared by 13 times exfoliation performed best while tested by illumination of red light. The response soared up to 550% as the response time and recovery time were smaller than 0.024 and 0.05 seconds respectively. The nanostructure of MoS2 were prepared by applying the technique of two-stage synthesis. Among the fabricating process, a thin layer of MoO3 was prepared at the beginning. Sequentially, to synthesized MoS2, the vulcanization process was taken under the condition of H2S gas. The thickness of MoS2 coatings of few-layer and 20-layer were 0.5 and 20 nm respectively. Both of them were sputtered Ag or Pt electrode. In the comparison of two indoor conditions: 35% and 90% RH, the response of few-layer of MoS2 with Ag electrode increased around 173%, and the response time was longer than 20-layer samples. However, the MoS2 with Pt electrode was more sensitive to alcoholic gas and performed high response up to 3300%.