Layout Data Compression Algorithm and Its Hardware Decoder Design for Multiple Electron-Beam Direct-Write Systems
博士 === 國立臺灣大學 === 電子工程學研究所 === 104 === The advances in optical projection lithography have ensured the steady continuation of Moore''s law. However, the wavelength of light sources has reached the lowest limit of 193-nm, and optical diffraction has become a major problem. Thus, oth...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92474890780302941846 |