Design and Implementation for a Tubular Linear Motor
碩士 === 國立聯合大學 === 機械工程學系碩士班 === 105 === Semiconductor and technology industry has rapidly developed in past years. In order to pursue high speed and high accuracy on the production, permanent-magnet linear motors are largely applied to semiconductor processing equipment and automation control. Tradi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57563892159971167803 |