Study of Electro-Optic Modulation Properties of LiNbO3 Microdisk Devices

• Main Authors: Kai-Jie You, 游凱傑
• Other Authors: 王子建
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/qa3693

碩士 === 國立臺北科技大學 === 光電工程系所 === 104 === Lithium niobate crystal has excellent electro-optic, acousto-optic and nonlinear optical properties, and this thesis studies make electrode structure use of suspension wire and use of electro-optic effect to modulate the resonant wavelength of the LiNbO3 microdisk. The undercut microdisk structure resonant device is fabricated by using film sputtering, optical lithography, ion implantation and chemical etching. Then, SiO2 film deposited on the chip and fabricated electrode. Electric field exist in microdisk when voltage was applied on electrode. The quality factor increases as the SiO2 film thickness increase, resonate wavelength will displacement, and free spectral range decrease due to different refractive of medium. Lithium niobate crystal doesn’t have light-emitting ability, but doping active medium like erbium, ytterbium and pumping source, lithium niobate crystal can produce optical gain. The device first is deposited erbium film by electron beam evaporation for 10nm, and then thermal treatment for erbium to diffusion in to lithium niobate at 1120ºC , entirely diffusion for erbium ions approximately 36 hours. We measure by 532nm and 976nm pump laser to excite the erbium ions, the luminous wavelength by 532nm pump laser is at 552nm and 980nm, the luminous wavelength by 976nm pump laser is at 1529nm.