The Study of Fabrication of Hydrogenated Amorphous Heterojunction Silicon Solar Cell by RF Magnetron Sputter
碩士 === 國立雲林科技大學 === 電子工程系 === 104 === The study of fabrication of hydrogenated amorphous heterojunction silicon solar cell by RF magnetron sputter. The hydrogenated amorphous Silicon film is changed by argon and hydrogen gas ratio. The film is analyzed by the SEM、FTIR、Rama and Conductivity, respecti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97248242590952779716 |