The Study on Electron Mobility of MoS2 Field-Effect Transistors under Air and Liquid Environments

• Main Authors: CHUNG,YA-TING, 鍾雅婷
• Other Authors: WANG, HSIANG-CHEN
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/3u5dcq

碩士 === 國立中正大學 === 光機電整合工程研究所 === 105 === The purpose of this experiment is to control the growth of monolayer and bilayer molybdenum disulfide by chemical vapor deposition. And the MoS2 layer and luminescence properties were analyzed with Raman spectra, Photoluminescence and Atomic Force Microscope. The method was to transfer MoS2 to a substrate which has a Pre-plating electrode and a thickness of 100 nm SiO2, And the use of electron beam lithography to define the electrode and then deposited on the gold that is completed MoS2 sensing device. Searching the effects of the mobility of Monolayer and bilayer MoS2 in air and different concentration of KCl liquid. It is known from the value of mobility that the Monlayer MoS2 have great sense ability to detect the concentration of liquid. When the 0.1 mM concentration of KCl, the ratio of the mobility with the liquid and in the ambient (μL/μAIR) is up to 150 times, but the relationship distribution does not have a linear curve. In contrast, although the sensitivity is not high at bilayer MoS2, the liquid concentration to the μL/μAIR is linearly distributed that suitable being sense element. In addition, the paper compare MoS2 with Si NW which usually be used. It is observed from the study that when the element have a line width of 100 nm, the concentration of ionic liquid and μL/μAIR have the linear relationship that has the potential to be the sensors for ionic liquid, as bilayer MoS2 does.