| Summary: | 碩士 === 國立高雄應用科技大學 === 機械工程系 === 105 === In this paper, we utilize lithography process in micro-electromechanical system (MEMS) with etched optical fibers processes and SU-8 3050 photoresist to production long-period fiber grating (LPFG). The periodic s-type and comb-type structure of photoresist is patterned onto the LPFG. Then, we use the electroforming process to deposit the nickel within the patterned periodic structure and we will obtain the metallic long period fiber grating (MLPFG) for magnetic field sensing. Then, we coating graphene oxide film on base s-type long period fiber grating (BSLPFG) for humidity sensing. Then, we adopt the PDMS, which is a kind of polymeric organosilicon compound, to coat the comb-type long period fiber grating and we will obtain the packaged comb-type long period fiber grating (PCLPFG) for strain sensing.
According to the magnetic field experimental results, the diameter of 50 μm yielded the best average wavelength sensitivity, which was 0.0141 nm/Gauss. The diameter of 42 μm yielded the best average transmission loss sensitivity, which was -0.0214 dB/Gauss.
According to the temperature experimental results, the diameter of 37 μm yielded the best heating and cooling average wavelength sensitivity, which were -0.5411 nm/℃ and -0.3130 nm/℃. The diameter of 50 μm yielded the best heating and cooling average transmission loss sensitivity, which were 0.5118 dB/℃ and 0.1562 dB/℃.
According to the humidity experimental results, the diameter of 37 μm yielded the best humidification and dehumidification average wavelength and transmission loss sensitivity, which were -0.0710 nm/%RH、-0.0444 nm/%RH、0.1624 dB/%RH and 0.1007 dB/%RH.
According to the strain experimental results, the sensor of 45˚direction of the right dip yielded the best wavelength and transmission loss sensitivity, which were 0.0182 nm/με and -0.0344 dB/με.
Therefore, the metallic long period fiber grating sensor can be applied to the magnetic field and temperature measurements, and the base s-type long period fiber grating can be applied to the humidity measurements, and the packaged comb-type long period fiber grating can be applied to the strain measurements.
|
|---|
