Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film
碩士 === 國立成功大學 === 微電子工程研究所 === 105
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
|
Online Access: | http://ndltd.ncl.edu.tw/handle/szwm7f |
id |
ndltd-TW-105NCKU5428057 |
---|---|
record_format |
oai_dc |
spelling |
ndltd-TW-105NCKU54280572019-05-15T23:47:01Z http://ndltd.ncl.edu.tw/handle/szwm7f Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film 雷射干涉微影術結合光電化學法與鈮酸鋰鐵電薄膜製作氮化鋁鎵/氮化鎵多重通道增強式金氧半高電子遷移率場效電晶體之研究 Chun-ChiWang 王峻淇 碩士 國立成功大學 微電子工程研究所 105 Ching-Ting Lee 李清庭 2017 學位論文 ; thesis 71 zh-TW |
collection |
NDLTD |
language |
zh-TW |
format |
Others
|
sources |
NDLTD |
description |
碩士 === 國立成功大學 === 微電子工程研究所 === 105 |
author2 |
Ching-Ting Lee |
author_facet |
Ching-Ting Lee Chun-ChiWang 王峻淇 |
author |
Chun-ChiWang 王峻淇 |
spellingShingle |
Chun-ChiWang 王峻淇 Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film |
author_sort |
Chun-ChiWang |
title |
Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film |
title_short |
Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film |
title_full |
Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film |
title_fullStr |
Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film |
title_full_unstemmed |
Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film |
title_sort |
investigation of algan/gan multiple channel e-mode moshemt fabricated using laser interference photolithography method, photoelectrochemical method and linbo3 ferroelectric film |
publishDate |
2017 |
url |
http://ndltd.ncl.edu.tw/handle/szwm7f |
work_keys_str_mv |
AT chunchiwang investigationofalganganmultiplechannelemodemoshemtfabricatedusinglaserinterferencephotolithographymethodphotoelectrochemicalmethodandlinbo3ferroelectricfilm AT wángjùnqí investigationofalganganmultiplechannelemodemoshemtfabricatedusinglaserinterferencephotolithographymethodphotoelectrochemicalmethodandlinbo3ferroelectricfilm AT chunchiwang léishègànshèwēiyǐngshùjiéhéguāngdiànhuàxuéfǎyǔnǐsuānlǐtiědiànbáomózhìzuòdànhuàlǚjiādànhuàjiāduōzhòngtōngdàozēngqiángshìjīnyǎngbàngāodiànziqiānyílǜchǎngxiàodiànjīngtǐzhīyánjiū AT wángjùnqí léishègànshèwēiyǐngshùjiéhéguāngdiànhuàxuéfǎyǔnǐsuānlǐtiědiànbáomózhìzuòdànhuàlǚjiādànhuàjiāduōzhòngtōngdàozēngqiángshìjīnyǎngbàngāodiànziqiānyílǜchǎngxiàodiànjīngtǐzhīyánjiū |
_version_ |
1719154769707139072 |