Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film

Investigation of AlGaN/GaN Multiple Channel E-Mode MOSHEMT Fabricated Using Laser Interference Photolithography Method, Photoelectrochemical Method and LiNbO3 Ferroelectric Film

碩士 === 國立成功大學 === 微電子工程研究所 === 105

Bibliographic Details
Main Authors:	Chun-ChiWang, 王峻淇
Other Authors:	Ching-Ting Lee
Format:	Others
Language:	zh-TW
Published:	2017
Online Access:	http://ndltd.ncl.edu.tw/handle/szwm7f

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