Summary: | 碩士 === 國立交通大學 === 光電工程研究所 === 105 === In this research work, an optical system is invented and successfully implemented for the realization of a complex, three-dimensional photonic crystal (PC) architecture. Our technique is novel, as it requires only two separate optical exposures, takes a few seconds to expose and yields a large sample size of ~1cm2.
This thesis is divided into three parts. The first part concerns the design of our new optical system and the preparation of a photo-sensitive material, SU8. In particular, precise positioning devices were built and process parameters for preparing a thick film of 6-20um were developed. The second part addresses optimization of optical exposure conditions, leading to the realization of a state-of-the-art 3D photonic-crystal with SP2 symmetry. This result represents the first ever large-scale fabrication of SP2 PC-architecture and holds promises for future large-scale and low-cost production of 3D PC. In the last part, optical properties of the fabricated PC were experimentally tested and the results compared to that computed from Transfer – Matrix – Method (TMM).
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