Phase Correlation and Binary Threshold Register for Alignment and Correction of Multifunctional Scanning Microscope Images Obtained Using Different Scanning Methods

• Main Authors: Wu, Min-Je, 吳旻哲
• Other Authors: Liu, Jia-Ming
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/3wk933

碩士 === 國立交通大學 === 照明與能源光電研究所 === 105 === We construct a multifunctional scanning microscope system. There are two scanning methods: One scans by moving a nanopositioning stage, and another by swaying galvanometer mirrors. Because of the optical path difference of two scanning method, there are differences in translation, rotation, and scaling between two images. In order to make the multifunctional scanning microscope system practically useful, we developed image registration technique to accurately calibrate the images obtained using the two scanning methods. Phase correlation cannot be estimated by images having translation, rotation, and scaling differences at the same time. We first use threshold binary image processing to increase accuracy. Then, we overlap the feature points of two images so that the feature points of the nanopositioning stage image could be viewed as the reference rotational axis. The translation, rotation, and scaling parameters are found by phase correlation. Five sets of experiments are carried out to verify that this method can correctly register the relationship of images that are obtained using different scanning methods.