Regularized Machine Learning Methods in Semiconductor Foundry Data Analysis
碩士 === 國立交通大學 === 電子研究所 === 105 === During wafer fabrication, volumes of data were recorded from monitoring through multi-stage and multi-step of manufacturing process. Yield quality is expected to be increased by discovering the information from the recorded data. For example, a drift in the value...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91018389469017096932 |