A Miniaturized 92-95 GHz On-Chip Slow-Wave Branch-Line Coupler

• Main Authors: Chen, Yi-Tang, 陳毅唐
• Other Authors: Wu, Lin-Kun
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/mqk6xb

碩士 === 國立交通大學 === 電信工程研究所 === 105 === This thesis studies the miniaturization of the 92-95 GHz branch-line coupler.In order to shorten the length of the λ/4 transmission lines used in the branch-line coupler, we utilized the periodic slow-wave structure. In chapter 2, we will describe the theory of the slow-wave structure. We also designed four types of branch-line coupler for which folded transmission lines and periodic slow-wave structures are applied. The area occupied by the coupler can be reduced without performance degradation. Chapter 3 introduces the process provided by National Nano Device Laboratories. Branch-line couplers in this thesis are implemented in this CMOS compatible process. All steps and instruments involved in the run will be briefly introduced in this chapter. The measured results will be shown in chapter 4. In addition to the performances of the four types of couplers and area reduction, the performances in different conditions are discussed. In the end, wafer center-to-edge and waferto-wafer variations will be checked to ensure the reliability of this process. The measured data will help to improve the process.