Research of thin film stress measurement
碩士 === 國立中央大學 === 光電科學與工程學系 === 105 === In this thesis, we propose a method measuring thin film stress on 8-inch substrate. The cantilever method is used as the basis for the improvement of the measuring system. We use dual electron beam gun evaporation with ion-beam assisted deposition to evaporate...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/74457187561778909409 |