In2O3/ZnO Superlattice Epitaxial Thin Films: Growth by Sputtering Deposition and Characterizations of Physical Properties
碩士 === 國立中山大學 === 物理學系研究所 === 105 === Superlattices of shallow quantum well structures with alternating layers of In2O3 and ZnO have been prepared by sputtering at 923K on c-sapphire substrates. Optimization of the processing parameters was attempted through varying the sputtering power, deposition...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82mwrr |