Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx

Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx

碩士 === 國立清華大學 === 工程與系統科學系 === 105 === abstract hide

Bibliographic Details
Main Authors: Chen, Teng-Chuan, 陳登荃
Other Authors: Wu, Yung-Hsien
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/r9g6g8
id ndltd-TW-105NTHU5593038
record_format oai_dc
spelling ndltd-TW-105NTHU55930382019-05-15T23:53:47Z http://ndltd.ncl.edu.tw/handle/r9g6g8 Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx 以斜方晶氧化鋯鉿實現可整合於後段製程之高效能金屬-絕緣層-金屬去耦合電容 Chen, Teng-Chuan 陳登荃 碩士 國立清華大學 工程與系統科學系 105 abstract hide Wu, Yung-Hsien 巫勇賢 2017 學位論文 ; thesis 80 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 105 === abstract hide
author2 Wu, Yung-Hsien
author_facet Wu, Yung-Hsien
Chen, Teng-Chuan
陳登荃
author Chen, Teng-Chuan
陳登荃
spellingShingle Chen, Teng-Chuan
陳登荃
Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx
author_sort Chen, Teng-Chuan
title Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx
title_short Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx
title_full Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx
title_fullStr Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx
title_full_unstemmed Back-End Integrable On-Chip MIM Decoupling Capacitors Featuring High Capacitance with Low Leakage Current by Orthorhombic HfZrOx
title_sort back-end integrable on-chip mim decoupling capacitors featuring high capacitance with low leakage current by orthorhombic hfzrox
publishDate 2017
url http://ndltd.ncl.edu.tw/handle/r9g6g8
work_keys_str_mv AT chentengchuan backendintegrableonchipmimdecouplingcapacitorsfeaturinghighcapacitancewithlowleakagecurrentbyorthorhombichfzrox
AT chéndēngquán backendintegrableonchipmimdecouplingcapacitorsfeaturinghighcapacitancewithlowleakagecurrentbyorthorhombichfzrox
AT chentengchuan yǐxiéfāngjīngyǎnghuàgàojiāshíxiànkězhěnghéyúhòuduànzhìchéngzhīgāoxiàonéngjīnshǔjuéyuáncéngjīnshǔqùǒuhédiànróng
AT chéndēngquán yǐxiéfāngjīngyǎnghuàgàojiāshíxiànkězhěnghéyúhòuduànzhìchéngzhīgāoxiàonéngjīnshǔjuéyuáncéngjīnshǔqùǒuhédiànróng
_version_ 1719158021100142592

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