Ferroelectric Hafnium–Based Oxides Negative-Capacitance FET:DC, Transient and Reliability

碩士 === 國立臺灣師範大學 === 光電科技研究所 === 105 === Ferroelectric Hafnium–based oxide has attracted lots of attention due to the negative capacitance effect, and it can be achieved with properly dopants and annealing. Steep SS (Subthreshold Swing) FETs using ferroelectric Hafnium-based oxide has the advantages...

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Bibliographic Details
Main Authors: Tang, Chi-Hsuan, 唐啟軒
Other Authors: Lee, Ming-Hung
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/w78tu4