The Studies of Piezoelectric Energy Harvesters by Screen Printing Method and Transfer Piezoelectric to Flexible Substrates as Tactile Sensor

• Main Authors: Ming-Yang Gao, 高銘揚
• Other Authors: Wen-Jong Wu
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/3jz6h8

碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 105 === As increasing of aging population, all major developed countries are going into aging societies. With the technologies of smart wearable devices getting matured, the market demand of remote healthcare using smart wearable devices keeps increasing and hope to reduce overall medical expenses. The obstacles of smart wearable devices for health monitor are preciseness and power sources. Therefore, the objective of this study is to develop high-performance and flexible piezoelectric devices which can be accuracy tactile sensors or energy harvesters. In order to have higher strain, the plastic substrates are needed. The sintering process for piezoelectric (PZT) film is typically over 800 °C which is not suitable for plastic substrates. Therefore, the development of PZT films on low temp resist substrate is important. We proposed a newly designed process in transfer high-performance PZT film on plastic substrate by screen printing with transfer technique. The d31 mode energy harvester based on stainless steel substrate was fabricated. The PZT thickness is 21.4 μm. The device has 1.80 μW maximum output power and 4.42 Vp-p open-circuit output voltage under an excitation frequency of 62.9 Hz and 0.5 g excitation acceleration level. The d31 mode energy harvester based on PET substrate was fabricated by transferring technique. The PZT thickness is 17.3 μm. The device has 2.71 μW maximum output power and 7.19 Vp-p open-circuit output voltage under an excitation frequency of 70.4 Hz and 0.5 g excitation acceleration level. The banding test has the result of 3.15 Vp-p open-circuit output voltage under an excitation frequency of 1.15 Hz with 1 mm displacement. Moreover, the tactile sensor was made and measure with human pulses successfully. These results show the potential of smart wearable devices with accuracy tactile sensors by simply transferring techniques.