Multi-stage Mach-Zehnder Interferometry Study on Process Insensitivity

• Main Authors: Hsiang - Chu, 朱翔
• Other Authors: Shih-Hsiang Hsu
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/85134209783554928712

碩士 === 國立臺灣科技大學 === 電子工程系 === 105 === Mach-Zehnder interferometry (MZI) can be applied onto communication and biomedical science. In communication, the MZI based wavelength division multiplexing (WDM) wavelength filter is sensitive to the processing variation and can be improved by the Z-transform. Among the three stages of the WDM filter, the delay length on the second stage, put on the opposite side compared with the previous stage besides the phase adding, demonstrates the stable and outstanding optical performance. In biomedical science, MZI was utilized to illustrate the surface plasmon resonance biosensing through the surrounding metal on silicon-wire waveguide. When the TM wave is injected into the plasmon region, there are two surface plasmon waves on the two metal layer surfaces will be generated and interfered as the interferograms. This mechanism is equivalent to a Mach-Zehnder interferometer. The surface plasmon biosensor processing can be separated as three parts, lithography, etching, and deposition of chemical vapor and physical vapor, which photomask are carried by the waveguide layer, metal window and transition region between silicon-wire and plasmon. The first photomask is process related lithorgraphy and the precise waveguide size and etch depth are crucial to the optical performance. The second photomask is the sensing related open window and the deposition will be utilized for the growth of silicon dioxide and metal. The metal thickness control is very critical to the biosensing performance. Finally the third photomask will only be used to open the transition region between the silicon-wire and plasmon.