Properties of Sol-gel Derived BiCu(1-x)NixO Thin Films

• Main Authors: TENG,CHUN-HUA, 鄧俊華
• Other Authors: TSENG,CHING-FANG
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/93913446127672719311

碩士 === 國立聯合大學 === 電子工程學系碩士班 === 105 === In this study, properties and microstructures of BiCu1-xNixO thin films prepared by sol-gel method on n-type Si(100) substrates at different thermal treatments have been investigated. The effects of different process parameters such as mole ratios (x=0.3~1), preheating temperatures (100~300oC), annealing treatments and temperatures (400~600oC) on the physical and chemical characteristics of BiCu1-xNixO were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscope (AFM), and X-ray photoelectron spectroscopy (XPS). The thermoelectric properties of BiCu1-xNixO thin film were also measured by hall system and self-made fixture. According to the experimental results, the better crystallinity and a relatively dense structure was obtained in the molar ratio of x = 0.5, a perheating temperature of 100oC, an annealing temperature of 400oC and into the annealing oxygen atmosphere flow rate of 200sccm. Effectively enhance the Seebeck coefficient, the maximum thermoelectric figure of merit is 4×10-6. Compared with the literature, the experimental results of the ZT value are still much lower, due to resistivity and thermal conductivity caused by too large.