Investigation of Exposure Compensation of Photolithography Processes in Semiconductor Manufacturing
碩士 === 國立臺北科技大學 === 工業工程與管理系碩士班 === 105 === Since semiconductor processes contain abundant complicated processing steps, the high-mixed production mode is one of the characteristics in the semiconductor industry. Hence, in the common practice, how to make the process stable and yield improved is a v...
Main Authors: | Xu,Bao-Yun, 許寶勻 |
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Other Authors: | Shu-Kai S. Fan |
Format: | Others |
Language: | en_US |
Published: |
2017
|
Online Access: | http://ndltd.ncl.edu.tw/handle/86bzr2 |
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